Chemical / Temperature Analyzer

ARCADIA partners with CI Semi to provide state-of-the-art technology for in-line, in situ, real-time processing monitoring for semiconductor & related factories. ARCADIA markets and provides full system integration, application lab, warranty support and inventory management in the region of Southeast Asia.

Among the leaders in the industry for more than 25 years, we use a variety of latest technologies to match customer's requirement:

  • NIR Spectroscopy

  • NDIR

  • Pyrometry

  • Conductivity

Wet Process Chemical Concentration Monitoring

The WetSpec line of wet process concentration analyzers offers cost effective solutions for in-line wet chemistry monitoring.  These products range from conductivity and NDIR solutions for simple chemistries concentration measurement, to spectroscopic systems for measuring multiple constituents and residues in complex solutions.  The main concentration monitoring application that are served by CI Semi’s products are cleaning (SC1, SC2…)  etching (HF, BOE, MAI….) and photo resist strippers  (EKC,  ACT, Piranha….).

WetSpec200
Wet process concentration analyzer - Multi Channel (up to 8 channel)
WetSpec201
Wet process concentration analyzer - Single Channel
WetCon100
Wet process Conductivity meter
WetRad2
Wet process monitoring sensor
Sample GUI
Spectroscopy
Near Infrared (NIR) spectroscopy technology
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In Situ, Non-contact Wafer Temperature Monitoring

NTM line of non-contact temperature monitors offers high end pyrometry products for the measurement of wafer temperatures during process.  The flagship of the line, the NTM Delta, incorporates real-time, same point emissivity measurement and compensation making it the ideal solution for in situ monitoring for processes such as RTP, CVD and PVD. The NTM family is also used by leading tool manufacturers.

 

The entire NTM product line offers a variety of pyrometers, with and without emissivity measurement, from visible to short (NIR) and long IR wavelength.  These pyrometers can be used for in situ true temperature measurement and/or reflectivity (single wavelength) during production. 

NTM VLT
Very Low Temperature, non-contact monitor
NTM Eta
Advanced In-situ pyrometer
NTM Delta
Advanced In situ Emissivity Independent Pyrometer
NTM W
Non-Contact Low Temperature Monitor
SR72
Accurate in-situ blackbody calibration source
Optical Interfaces
For the Non-contact Temperature Monitors (NTM) Product Line

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